Device and method generating internal voltage in semiconductor memory device

ABSTRACT

A semiconductor memory device and a method of generating an internal voltage in the semiconductor memory device are provided. The semiconductor memory device includes a controller configured to activate a sensing enable signal when an active command is applied from outside, inactivate the sensing enable signal when a precharge command is applied, and output the sensing enable signal, and an array internal voltage generator configured to output an active array power supply voltage as an array power supply voltage when the sensing enable signal is activated, output an external array power supply voltage and a standby array power supply voltage as the array power supply voltage when the sensing enable signal is inactivated, and output the standby array power supply voltage alone as the array power supply voltage when the sensing enable signal is inactivated for at least a specific period.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of Korean Patent Application No.10-2008-0013910 filed Feb. 15, 2008, the subject matter of which ishereby incorporated by reference.

BACKGROUND

The invention relates to semiconductor memory devices and a method ofgenerating an internal voltage within said devices. More particularly,the invention relates to semiconductor memory devices capable ofperforming an overdriving operation with reduced noise and a method ofgenerating an internal voltage in said semiconductor memory devices.

Semiconductor memory devices are constantly being made to have higherintegration density, lower power consumption and higher data processingrates. As a result, the size of the various components formingsemiconductor memory devices are reduced and power supply voltagesapplied during the operation are decreased. Thus, there is a continuingdemand for various technologies that collectively cooperate to fabricateincreasingly small semiconductor memory devices capable of operating athigher speed with relatively lower applied operating voltage(s). Asense-amplifier overdriving technique is one such technology.

In order to assure relatively low power consumption, most conventionalsemiconductor memory devices have an internal power supply voltagegeneration circuit receiving an external power supply voltage andgenerating a lower internal power supply voltage. It should be notedthat conventional semiconductor memory devices use a plurality ofdifferent internal power supply voltages for various purposes. One ofthe internal power supply voltages supplied to a memory cell array isreferred to as an array power supply voltage.

Figure (FIG.) 1 is a circuit diagram of a memory cell array of asemiconductor memory device.

When a word line WL selected by a row address is activated in thesemiconductor memory device, data from a plurality of memory cells MCconnected with the word line WL is transferred to a pair of bit lines BLand /BL. When sense amplifier drivers MP and MN, turned ON in responseto a P sensing signal (pse) and an N sensing signal (nse), theyrespectively supply an array power supply voltage VINTA and an arrayground voltage (VSSA) to a sense amplifier power supply line RTO and asense amplifier ground line /S. A plurality of sense amplifiers SA areactivated and operate in relation to a voltage difference between thepair of bit lines BL and /BL. As typically implemented, a large numberof sense amplifiers SA operate simultaneously. Thus, it is difficult toamplify data from a large number of cells during a short period of timewhen the array power supply voltage (VINTA) is applied as a conventionalinternal array power supply voltage having a relatively low level. Inother words, the bit line sensing speed of the foregoing devicedecreases in relation to the quantity of data being processed, andultimately the semiconductor memory device cannot operate at asufficiently high speed.

In addition to the foregoing limitation, the size of a metal-oxidesemiconductor (MOS) transistor implementing the sense amplifier isinevitably reduced as the overall semiconductor memory device isfabricated with a higher degree of device integration. When the size ofan MOS transistor of the sense amplifiers SA is reduced, it is efficientto reduce the size of p-type MOS (PMOS) transistors SP1 and SP2 whichare generally formed larger than the n-type MOS (NMOS) transistors SN1and SN2 because their inherent current driving capability is small.However, when the size of the PMOS transistors SP1 and SP2 decreases, itis difficult for the sense amplifiers SA to properly amplify data to asufficiently high level.

To address the above-mentioned problems, a method is used which suppliesan external array power supply voltage (VCCA) having a higher level thanan internal array power supply voltage (IVCA) as the array power supplyvoltage (VINTA) to the sense amplifier power supply line RTO for aspecific period of time as the sense amplifiers SA begin operation tothereby drive the sense amplifiers SA. This approach is commonlyreferred to as sense amplifier overdriving. That is, the senseamplifiers SA receive the external array power supply voltage (VCCA) asthe array power supply voltage (VINTA) through the sense amplifier powersupply line RTO during an overdriving operation, and the internal arraypower supply voltage (IVCA) as the array power supply voltage (VINTA)during a sensing operation.

SUMMARY

Embodiments of the invention provide an internal voltage generatorwithin a semiconductor memory device that activates an overdrivingsignal in response to a precharge command and lengthens an overdrivingperiod such that the semiconductor memory device operates more stably.Embodiments of the invention also provide an overdriving method adaptedfor use within a semiconductor memory device.

In one embodiment, a semiconductor memory device comprises; a controllerconfigured to activate a sensing enable signal when an active command isapplied, inactivate the sensing enable signal when a precharge commandis applied, and output the sensing enable signal, and an array internalvoltage generator configured to output an active array power supplyvoltage as an array power supply voltage when the sensing enable signalis activated, output an external array power supply voltage and astandby array power supply voltage as the array power supply voltagewhen the sensing enable signal is inactivated, and output the standbyarray power supply voltage as the array power supply voltage when thesensing enable signal is inactivated for at least a specific period.

In another embodiment, a method of generating an internal power supplyvoltage in a semiconductor memory device comprises; a sensing enablesignal generation step of activating a sensing enable signal when anactive command is applied from outside, inactivating the sensing enablesignal when a precharge command is applied, and outputting the sensingenable signal, an active step of outputting an active array power supplyvoltage as an array power supply voltage when the sensing enable signalis activated, an overdriving step of outputting an external array powersupply voltage and a standby array power supply voltage as the arraypower supply voltage when the sensing enable signal is inactivated, anda standby step of outputting the standby array power supply voltage asthe array power supply voltage when the sensing enable signal isinactivated for at least a specific time.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the invention are described in some additional detailbelow with reference to the accompanying drawings. It should beunderstood that various aspects of the drawings may have beenexaggerated for clarity:

FIG. 1 is a circuit diagram of a memory cell array of a semiconductormemory device;

FIG. 2 is a block diagram of an internal voltage generator of asemiconductor memory device according to an embodiment of the invention;

FIG. 3 is a circuit diagram further illustrating one possible embodimentof the overdriving signal generator of FIG. 2;

FIG. 4 is a timing diagram further illustrating the operation of theinternal voltage generator of FIG. 2; and

FIG. 5 is a timing diagram illustrating a sensing operation within asemiconductor memory device according to an embodiment of the invention.

DESCRIPTION OF EMBODIMENTS

Various example embodiments will now be described more fully withreference to the accompanying drawings. However, the invention may bevariously embodied and should not be construed as being limited to onlythe illustrated embodiments. Throughout the drawings and writtendescription, like reference symbols and numbers refer to like or similarelements.

It will be understood that, although the terms first, second, etc. maybe used herein, they are used only to distinguish one element fromanother, not to limit elements in any way. The terms first and secondcould be interchanged with respect to a given element without departingfrom the scope of the present invention. Also, the term “and/or” picksout each individual item as well as all combinations of them.

It will be understood that when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present. Other words used to describe relationshipsbetween elements should be interpreted in a like fashion (e.g.,“between” versus “directly between,” “adjacent” versus “directlyadjacent,” etc.).

Terms used in this specification are not intended to limit the exampleembodiments of the invention. Elements referred to in the singular areto be interpreted as possibly being plural unless stated otherwise. Inaddition, the terms “comprise,” “comprising,” “include” and “including”do not exclude the existence or addition of at least one component, stepand/or device other than those mentioned.

An overdriving apparatus and method of a semiconductor memory deviceaccording to example embodiments of the inventive concept will bedescribed in detail below with reference to the accompanying drawings.

FIG. 2 is a block diagram of an internal voltage generator for asemiconductor memory device according to an embodiment of the invention.FIG. 3 is a circuit diagram further illustrating one possible embodimentof the overdriving signal generator of FIG. 2. Referring collectively toFIGS. 2 and 3, a controller 100 receives an externally provided command(CMD), and outputs a sensing enable signal (sae) in response to thereceived command. The controller 100 activates the sensing enable signalwhen the received command is an active command (e.g., a read/writecommand), but inactivates the sensing enable signal when the receivedcommand CMD is a non-active command such as a precharge command.

An array internal voltage generator 300 includes a standby power supplyvoltage generator 310, an active power supply voltage generator 320 anda ground driver 332, and supplies an array power supply voltage (VINTA)and an array ground voltage (VSSA) to the memory cell array.

The standby power supply voltage generator 310 includes a standbydriving signal generator 311 and a standby driver 312. In response tothe overdriving start signal (ovst), the standby driving signalgenerator 311 compares an overdriving array reference voltage (OVrefA)applied from a reference voltage generator (not shown) with the arraypower supply voltage and outputs a standby control signal (scon). Thestandby driver 312 adjusts the level of an external power supply voltage(VCC) and generates the standby array power supply voltage (SIVCA) asthe array power supply voltage in response to the standby controlsignal.

Here, the standby power supply voltage generator 210 is included tosupply the array power supply voltage to the memory cell array during astandby operation, and thus is designed to have a relatively smalldriving capability.

The active power supply voltage generator 320 includes an active drivingsignal generator 321, an overdriving signal generator 322 and an activedriver 323. During an active operation, the semiconductor memory devicerequires more current than during the standby operation. Therefore, theactive power supply voltage generator 320 has a relatively large drivingcapability to supply sufficient current to the memory cell array duringan active operation. The active driving signal generator 321 outputs anactive control signal (acon) in response to the overdriving startsignal. And, in response to the active control signal and an overdrivingenable signal (vove), the active driver 223 adjusts the level of theexternal power supply voltage and generates an active array power supplyvoltage (AIVCA).

In the active power supply voltage generator 320, an overdriving signalgenerator 322 receives the sensing enable signal. The overdriving signalgenerator 322 includes an overdriving start signal generator 410, anoverdriving end signal generator 420 and an overdriving enable signalgenerator 430.

The overdriving start signal generator 410 generates the overdrivingstart signal in response to the sensing enable signal. The overdrivingstart signal generator 410 includes an inverter IV1 that inverts thesensing enable signal, a delay unit DELL that delays the invertedsensing enable signal by a first delay period, a NOR gate NOR1 thatreceives the inverted sensing enable signal and the inverted and delayedsensing enable signal and performs a logical NOR operation on the twosignals, and an inverter IV2 that inverts an output signal of the NORgate NOR1 to output the overdriving start signal. The number of delayelements in the delay unit DEL1 may be adjusted such that theoverdriving start signal can be immediately activated when the sensingenable signal is activated, and inactivated after the first delay periodwhen the sensing enable signal is inactivated.

The overdriving end signal generator 420 generates an overdriving endsignal (ovof) to inactivate the overdriving enable signal after aspecific period of time when a precharge period tRP, during which thesensing enable signal is inactivated, is too long. The overdriving endsignal generator 420 includes an inverter IV3 that inverts the sensingenable signal, a delay unit DEL2 that delays the inverted sensing enablesignal by a second delay period, a NAND gate NAND1 that receives theinverted sensing enable signal and the inverted and delayed sensingenable signal and performs a logical NAND operation on the two signals,and an inverter IV4 that inverts an output signal of the NAND gate NAND1to output the overdriving end signal.

An overdriving operation supplies an external array power supply voltage(VCCA), which is higher than a standby array power supply voltage(SIVCA) or an active array power supply voltage (AIVCA) as the arraypower supply voltage (VINTA) generally supplied to the memory cell arrayof the semiconductor memory device. Thus, as an overdriving period(VOVP) is extended, an overshoot may occur in the memory cell array.Therefore, in relation to the precharge period tRP, as defined by aperiod from application of a precharge command PRE to the application ofan active command ACT, the overdriving operation must be finished withina specific period.

Consequently, in the overdriving end signal generator 420, the number ofdelay elements of the delay unit DEL2 may be adjusted to determine atime after the sensing enable signal is inactivated until overdriving isfinished. As a result, the overdriving end signal is activated after thesecond delay period when the sensing enable signal is inactivated, andis immediately inactivated when the sensing enable signal is activated.

The overdriving enable signal generator 430 generates the overdrivingenable signal in response to the overdriving start signal and theoverdriving end signal. The overdriving enable signal generator 430includes a delay unit DEL3 that delays the overdriving end signal by athird delay period, a NOR gate NOR2 that receives the overdriving endsignal and the delayed overdriving end signal and performs a logical NORoperation on the two signals, and an NAND gate NAND2 that performs alogical NAND operation on an output signal of the NOR gate NOR2 and theoverdriving start signal to output the overdriving enable signal. Here,the overdriving start signal is activated after a specific delay timefollowing the activation of the sensing enable signal, and theoverdriving end signal is immediately inactivated when the sensingenable signal is activated. Therefore, the delay unit DEL3 delays theoverdriving end signal by the third delay period to prevent theoverdriving enable signal from being activated for a specific timebetween the inactivation of the overdriving end signal, performedimmediately after the sensing enable signal is activated, and theactivation of the overdriving start signal.

As described above, in the internal voltage generator according to theillustrated embodiment, the overdriving enable signal is set to finishoverdriving before an active command is applied when the prechargeperiod tRP is long, thereby preventing overshoot in the memory cellarray. However, when the overdriving period (VOVP) is stopped before asensing operation due to the long precharge period tRP, the level of theoverdriven voltage (VCCA) is gradually reduced by leakage current.Therefore, when overdriving is finished before the sensing operation,additional power must be supplied such that the memory cell array canmaintain the level of the overdriven voltage. Since the voltage level tobe maintained is the level of the external array power supply voltage(VCCA), a standby driving signal generator 311 receives an overdrivingarray reference voltage (OVrefA) having a higher level than the arrayreference voltage (VrefA) and generates the standby array power supplyvoltage (SIVCA). On the other hand, an active driving signal generator321 receives the array reference voltage and generates the active arraypower supply voltage. Therefore, the standby array power supply voltagehas a higher level than the active array power supply voltage and canmaintain the overdriven voltage level of the memory cell array. Here,the overdriving array reference voltage has a lower level than theexternal array power supply voltage. This is because overshoot may occurin the memory cell array, like in the overdriving operation, when thestandby array power supply voltage has the same level as the externalarray power supply voltage.

Meanwhile, the standby array power supply voltage has a higher levelthan the active array power supply voltage, and thus the standby arraypower supply voltage must not be applied to the memory cell array whenthe semiconductor memory device is in the active operation. Therefore,the standby driving signal generator 311 receives the overdriving startsignal and is activated or inactivated in accordance with theoverdriving start signal. The active driving signal generator 321 alsoreceives the overdriving start signal, but is configured to beinactivated when the overdriving start signal is activated, andactivated when the overdriving start signal is inactivated. However, theactive driving signal generator 321 may be activated after receiving thesensing enable signal from the controller 100. Also, the standby drivingsignal generator 311 may be activated after receiving the sensing enablesignal from the controller 100.

FIG. 4 is a timing diagram further illustrating the operation of theinternal voltage generator of FIG. 2. First, when the precharge commandPRE is applied, the controller 100 inactivates the sensing enable signal(sae). In response to the inactivated sensing enable signal, theoverdriving start signal generator 410 of the overdriving signalgenerator 322 immediately activates the overdriving start signal (ovst).In response to the activated overdriving start signal, the overdrivingenable signal generator 430 activates the overdriving enable signal(vove). Likewise, the standby driving signal generator 311 is activatedin response to the overdriving start signal and outputs a standbycontrol signal (scon). In response to the standby control signal, astandby driver 312 outputs the standby array power supply voltage(SIVCA). On the other hand, the active driving signal generator 321inactivates the active control signal in response to the overdrivingstart signal, and an active driver 323 outputs the external array powersupply voltage (VCCA) in response to the overdriving enable signal.Therefore, the external array power supply voltage VCCA is supplied asthe array power supply voltage (VINTA).

When the sensing enable signal is activated in response to an activecommand (ACT) and a precharge period tRP1 is relatively short, theinactivation of the overdriving start signal occurs before theactivation of the overdriving end signal. Thus, the overdriving enablesignal is inactivated in response to the inactivation of the overdrivingstart signal. At the same time, the standby power supply voltagegenerator 310 stops the supply of the standby array power supplyvoltage. In response to the overdriving start signal, the active drivingsignal generator 321 activates the active control signal, and the activedriver 323 applies the active array power supply voltage to the memorycell array. And, the ground driver 332 receives an external groundvoltage (VSS) and supplies the array ground voltage (VSSA) to the memorycell array.

On the other hand, when a precharge period tRP2 is relatively long, theactivation of the overdriving end signal occurs before the inactivationof the overdriving start signal. When the overdriving end signal isactivated, the overdriving enable signal is inactivated and theoverdriving operation is stopped. However, the overdriving start signalis still in an active state, and thus the standby power supply voltagegenerator 310 keeps supplying the standby array power supply voltageSIVCA. Therefore, even if the overdriving operation is stopped, thememory cell array maintains an overdriven voltage level due to thestandby array power supply voltage SIVCA. After this, operationperformed when the active command ACT is applied is the same asdescribed above.

FIG. 5 is a timing diagram illustrating a sensing operation adapted foruse in semiconductor memory device according to an embodiment of theinvention.

In FIG. 5, the sensing enable signal (sae) is activated in response toan active command (ACT) and inactivated in response to a prechargecommand (PRE). The overdriving enable signal (vove) is activated whenthe sensing enable signal is inactivated, and inactivated after aspecific time when the sensing enable signal is activated. However, theoverdriving enable signal is activated in response to the prechargecommand applied before the active command. As a result, the overdrivingperiod (VOVP) depending on the overdriving enable signal is relativelylong. In addition, since the precharge period tRP from when theprecharge command is applied to when the active command is applied isnot fixed, the overdriving enable signal has a variable pulse width.Thus, the overdriving period also varies.

The sensing operation adapted for use in a semiconductor memory deviceincluding an overdriving capability according to an embodiment of theinvention will now be described with reference to FIG. 5. When an activecommand ACT is applied, the sensing enable signal is activated. Theoverdriving enable signal is activated before the sensing enable signalis activated, and inactivated after a specific time when the sensingenable signal is activated. The active driver 323 receives theoverdriving enable signal activated before the sensing enable signal isactivated, and supplies the external array power supply voltage (VCCA)as the array power supply voltage (VINTA). When the overdriving enablesignal is inactivated after the specific time following the activationof the sensing enable signal, and the active control signal isactivated, the active driver 323 supplies the active array power supplyvoltage (AIVCA) as the array power supply voltage to the memory cellarray in response to the activated active control signal. The grounddriver 332 supplies the array ground voltage (VSSA) to the memory cellarray at all times. Meanwhile, after a specific time following theactivation of the sensing enable signal, a P sensing signal (pse) and anN sensing signal (nse) are activated. When sensing drivers MP and MN areactivated in response to the P sensing signal and the N sensing signal,and the array power supply voltage and the array ground voltage areapplied to a sense amplifier SA, the sense amplifier SA amplifies avoltage difference between a pair of bit lines BL and /BL.

When the precharge command is applied, the sensing enable signal isinactivated. In response to the inactivated sensing enable signal, the Psensing signal and the N sensing signal are inactivated, and the senseamplifier SA stops its sensing operation. Meanwhile, the overdrivingenable signal is activated in response to the inactivated sensing enablesignal. Thus, the active driver 323 applies the external array powersupply voltage to the memory cell array, thereby performing theoverdriving operation. When the overdriving operation starts, theexternal power supply voltage is applied as the array power supplyvoltage, and the array ground voltage is raised to a specific level andreduced. Here, the array ground voltage may include noise. However, thesemiconductor memory device does not perform the sensing operation inresponse to the precharge command and thus does not malfunction due tosuch noise. After a specific time, the array power supply voltage ismaintained at the stable external power supply voltage. Since the arraypower supply voltage is stably maintained, noise is also removed fromthe array ground voltage, and the array ground voltage is stablymaintained. After this, as described above, an active command isapplied, the overdriving period (VOVP) is finished, and both the arraypower supply voltage and the array ground voltage are stably maintained.According to the foregoing approach, the sense amplifier SA performs astable sensing operation.

In FIG. 5, the overdriving enable signal is activated in response to theinactivation of the sensing enable signal, inactivated in response tothe activation of the sensing enable signal, and thus has a relativelylong pulse width. Therefore, the overdriving period can be set to bevery long, and the sense amplifier SA performs its sensing operation ina condition where noise is removed from the array power supply voltageand the array ground voltage. However, there is no difference in theperiod in which the sense amplifier SA amplifies a voltage differencebetween the pair of bit lines BL and /BL. Rather, the sensing period(NSP) may be lengthened by advancing the timing of the end ofoverdriving because overdriving has been already performed and the arraypower supply voltage and the array ground voltage are stably maintained.Also, a RAS-to-CAS delay time (tRCD) characteristic can be improved byadvancing the timing of the P sensing signal and the N sensing signal.

In the foregoing description, the active driver 323 outputs the activearray power supply voltage (AIVCA) or the external array power supplyvoltage (VCCA) in response to the active control signal or theoverdriving enable signal, but an overdriver that outputs the externalarray power supply voltage (VCCA) in response to the overdriving enablesignal may be additionally included. When the additional overdriver isincluded, it is possible to adjust the level of the external array powersupply voltage (VCCA) differently from the external power supply voltage(VCC) and output it.

According to illustrated embodiments of an internal voltage generatorand overdriving method for a semiconductor memory device, an overdrivingsignal may be activated in response to a precharge signal. Thus, it ispossible to lengthen an overdriving period. A sense amplifier performsits sensing operation in a condition where noise is removed from anarray power supply voltage and an array ground voltage, so that thesemiconductor memory device can stably operate. In addition, since anoverdriving operation is performed in advance of an active operation, itis possible to increase the operating speed of the semiconductor memorydevice.

While example embodiments have been disclosed herein, it should beunderstood that other variations may be possible. Such variations arenot to be regarded as a departure from the scope of the invention, andall such modifications are intended to be included within the scope ofthe following claims.

1. A semiconductor memory device, comprising: a controller configured toactivate a sensing enable signal when an active command is applied,inactivate the sensing enable signal when a precharge command isapplied, and output the sensing enable signal; and an array internalvoltage generator configured to output an active array power supplyvoltage as an array power supply voltage when the sensing enable signalis activated, output an external array power supply voltage and astandby array power supply voltage as the array power supply voltagewhen the sensing enable signal is inactivated, and output the standbyarray power supply voltage as the array power supply voltage when thesensing enable signal is inactivated for at least a specific period. 2.The semiconductor memory device of claim 1, wherein the array internalvoltage generator comprises: an active power supply voltage generatorconfigured to activate an overdriving start signal and output theexternal array power supply voltage when the sensing enable signal isinactivated, and receive an array reference voltage and output theactive array power supply voltage in response to the array referencevoltage when the sensing enable signal is activated; and a standby powersupply voltage generator configured to receive an overdriving referencevoltage having a higher level than the array reference voltage, andoutput the standby array power supply voltage in response to theoverdriving start signal.
 3. The semiconductor memory device of claim 2,wherein the active power supply voltage generator comprises: anoverdriving signal generator configured to activate the overdrivingstart signal and an overdriving enable signal when the sensing enablesignal is inactivated; an active driving signal generator configured tobe activated when the overdriving start signal is inactivated, comparethe array reference voltage with the array power supply voltage, andoutput an active control signal; and an active driver configured toreceive an external power supply voltage, adjust a level of the externalpower supply voltage in response to the active control signal, outputthe active array power supply voltage, and output the external powersupply voltage as the external array power supply voltage in response tothe overdriving enable signal.
 4. The semiconductor memory device ofclaim 3, wherein the overdriving signal generator comprises: anoverdriving start signal generator configured to immediately activatethe overdriving start signal that sets overdriving start and end timingswhen the sensing enable signal is inactivated, and inactivate theoverdriving start signal after a first delay period when the sensingenable signal is activated; an overdriving end signal generatorconfigured to activate an overdriving end signal that sets theoverdriving end timing when the sensing enable signal is inactivated forat least a second delay period, and immediately inactivate theoverdriving end signal when the sensing enable signal is activated; andan overdriving enable signal generator configured to immediatelyactivate or inactivate the overdriving enable signal in response to theoverdriving start signal when the overdriving end signal is in aninactive state, immediately inactivate the overdriving enable signalwhen the overdriving end signal is activated, and activate theoverdriving enable signal after a third delay period longer than thefirst delay period when the overdriving end signal is inactivated. 5.The semiconductor memory device of claim 2, wherein the standby powersupply voltage generator comprises: a standby driving signal generatorconfigured to be activated when the overdriving start signal isactivated, compare the overdriving reference voltage with the arraypower supply voltage, and output a standby control signal; and a standbydriver configured to receive an external power supply voltage, adjust alevel of the external power supply voltage in response to the standbycontrol signal, and output the standby array power supply voltage. 6.The semiconductor memory device of claim 2, wherein the array internalvoltage generator further comprises a ground driver configured toreceive an external ground voltage and output an array ground voltage.7. The semiconductor memory device of claim 1, further comprising: amemory cell array including a plurality of sense amplifiers respectivelyconnected between a plurality of pairs of bit lines and between a senseamplifier power supply line and a sense amplifier ground line, and senseand amplify a voltage difference between the pairs of bit lines; a firstsense amplifier driver configured to supply the array power supplyvoltage having the same level as the active array power supply voltageto the sense amplifier power supply line in response to a P sensingsignal applied after a specific time when the sensing enable signal isactivated; a second sense amplifier driver configured to supply an arrayground voltage to the sense amplifier ground line in response to an Nsensing signal applied at the same time as the P sensing signal when thesensing enable signal is activated; and a sense amplifier overdriverconfigured to supply the array power supply voltage having the samelevel as the external array power supply voltage to the sense amplifierpower supply line in response to the overdriving enable signal.
 8. Amethod of generating an internal power supply voltage in a semiconductormemory device, comprising: a sensing enable signal generation step ofactivating a sensing enable signal when an active command is appliedfrom outside, inactivating the sensing enable signal when a prechargecommand is applied, and outputting the sensing enable signal; an activestep of outputting an active array power supply voltage as an arraypower supply voltage when the sensing enable signal is activated; anoverdriving step of outputting an external array power supply voltageand a standby array power supply voltage as the array power supplyvoltage when the sensing enable signal is inactivated; and a standbystep of outputting the standby array power supply voltage as the arraypower supply voltage when the sensing enable signal is inactivated forat least a specific time.
 9. The method of claim 8, wherein theoverdriving step includes: an overdriving signal generation step ofgenerating an overdriving start signal and an overdriving enable signalin response to the sensing enable signal; and an external array powersupply voltage generation step of receiving an external power supplyvoltage in response to the overdriving enable signal, and outputting theexternal array power supply voltage.
 10. The method of claim 9, whereinthe overdriving signal generation step includes: an overdriving startsignal generation step of immediately activating the overdriving startsignal that sets overdriving start and end timings when the sensingenable signal is inactivated, and inactivating the overdriving startsignal after a first delay period when the sensing enable signal isactivated; an overdriving end signal generation step of activating anoverdriving end signal that sets the overdriving end timing when thesensing enable signal is inactivated for at least a second delay period,and immediately inactivating the overdriving end signal when the sensingenable signal is activated; and an overdriving enable signal generationstep of immediately activating or inactivating the overdriving enablesignal in response to the overdriving start signal when the overdrivingend signal is in an inactive state, immediately inactivating theoverdriving enable signal when the overdriving end signal is activated,and activating the overdriving enable signal after a third delay periodlonger than the first delay period when the overdriving end signal isinactivated.
 11. The method of claim 10, wherein the active stepincludes: an active driving signal generation step of being activated inresponse to the overdriving start signal, comparing a level of an arrayreference voltage with a level of the array power supply voltage, andoutputting an active control signal; and an active array power supplyvoltage generation step of receiving an external power supply voltage,adjusting a level of the external power supply voltage in response tothe active control signal, and outputting the active array power supplyvoltage.
 12. The method of claim 11, wherein the standby step includes:a standby driving signal generation step of being activated in responseto the overdriving start signal, comparing a level of an overdrivingreference voltage that is higher than the level of the array referencevoltage with the level of the array power supply voltage, and outputtinga standby control signal; and a standby array power supply voltagegeneration step of receiving the external power supply voltage,adjusting the level of the external power supply voltage in response tothe standby control signal, and outputting the standby array powersupply voltage.